Abstract
Molybdenum (Mo) thin films were sputtered onto soda lime glass (SLG) substrates. The main variable in the deposition parameters, the argon (Ar) pressure p Ar, was varied in the range of 6 - 20 mTorr. Ex situ spectroscopic ellipsometry (SE) was performed to find out that the dielectric functions ε of the Mo films were strongly dependent on p Ar, indicating a consistent and significant decrease in the Mo film density ρ Mo with increasing p Ar. This trend was confirmed by high-angle-annular-dark-field scanning transmission electron microscopy. ε of Mo was then found to be correlated with secondary ion mass spectroscopy profiles of Sodium (Na) in the Cu(In xGa 1-x)Se 2 (CIGS) layer grown on top of Mo/SLG. Therefore, in situ optical diagnostics can be applied for process monitoring and optimization in the deposition of Mo for CIGS solar cells. Such capability is demonstrated with simulated optical transmission and reflectance of variously polarized incident light, using ε deduced from SE.
Original language | American English |
---|---|
Pages | 2749-2752 |
Number of pages | 4 |
DOIs | |
State | Published - 2011 |
Event | 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 - Seattle, WA, United States Duration: 19 Jun 2011 → 24 Jun 2011 |
Conference
Conference | 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 |
---|---|
Country/Territory | United States |
City | Seattle, WA |
Period | 19/06/11 → 24/06/11 |
Bibliographical note
See NREL/CP-5200-50701 for preprintNREL Publication Number
- NREL/CP-5200-55734