Dependence of Hydrogen Incorporation in Undoped a-Si:H and uc-Si:H on Hydrogen Dilution during PECVD

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages85-90
    Number of pages6
    StatePublished - 1988
    EventMRS Spring Meeting - Reno, Nevada
    Duration: 5 Apr 19888 Apr 1988

    Conference

    ConferenceMRS Spring Meeting
    CityReno, Nevada
    Period5/04/888/04/88

    Bibliographical note

    Work performed by Xerox Palo Alto Research Center, Palo Alto, California

    NREL Publication Number

    • ACNR/CP-10492

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