Dependence of Material Properties of Radio-Frequency Magnetron-Sputtered, Cu-Doped, ZnTe Thin Films on Deposition Conditions

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1501-1506
Number of pages	6
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	4
DOIs	https://doi.org/10.1116/1.579345
State	Published - 1994

NREL Publication Number

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title = "Dependence of Material Properties of Radio-Frequency Magnetron-Sputtered, Cu-Doped, ZnTe Thin Films on Deposition Conditions",

author = "NREL",

year = "1994",

doi = "10.1116/1.579345",

language = "American English",

volume = "12",

pages = "1501--1506",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Dependence of Material Properties of Radio-Frequency Magnetron-Sputtered, Cu-Doped, ZnTe Thin Films on Deposition Conditions

AU - NREL, null

PY - 1994

Y1 - 1994

U2 - 10.1116/1.579345

DO - 10.1116/1.579345

M3 - Article

SN - 0734-2101

VL - 12

SP - 1501

EP - 1506

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -