Dependence of the Electrical Properties of Ion-Beam Sputtered ITO on its Composition and Structure

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)1314-1315
    Number of pages2
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number4, Part II
    StatePublished - 1987

    NREL Publication Number

    • ACNR/JA-213-8200

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