Dependence of the Electrical Properties of Ion-Beam Sputtered ITO on its Composition and Structure

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1314-1315
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4, Part II
DOIs	https://doi.org/10.1116/1.574756
State	Published - 1987

NREL Publication Number

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title = "Dependence of the Electrical Properties of Ion-Beam Sputtered ITO on its Composition and Structure",

author = "NREL",

year = "1987",

doi = "10.1116/1.574756",

language = "American English",

volume = "5",

pages = "1314--1315",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4, Part II",

}

TY - JOUR

T1 - Dependence of the Electrical Properties of Ion-Beam Sputtered ITO on its Composition and Structure

AU - NREL, null

PY - 1987

Y1 - 1987

U2 - 10.1116/1.574756

DO - 10.1116/1.574756

M3 - Article

SN - 0734-2101

VL - 5

SP - 1314

EP - 1315

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4, Part II

ER -