Abstract
Mo thin films were deposited on sodalime glass (SLG) substrates using direct-current planar magnetron sputtering, with a sputtering power density of 1.18 W/cm2. The working gas (Ar) pressure was varied from 0.6 mtorr to 16 mtorr to gain a better understanding of the effect of sputtering pressure on the morphology and microstructure of the Mo. Thin films of Cu(In,Ga)Se2 (CIGS) were deposited onthe Mo-coated glass using the 3-stage coevaporation process. The morphology of both the Mo-coated SLG and the CIGS thin films grown on it was examined using high-resolution scanning electron microscopy. The film microstructure, such as the preferred orientation, and the residual intrinsic stress were examined by X-ray diffraction.
Original language | American English |
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Number of pages | 14 |
State | Published - 2001 |
Event | Sharjah Solar Energy Conference - Sharjah, United Arab Emirates Duration: 19 Feb 2001 → 22 Feb 2001 |
Conference
Conference | Sharjah Solar Energy Conference |
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City | Sharjah, United Arab Emirates |
Period | 19/02/01 → 22/02/01 |
NREL Publication Number
- NREL/CP-520-29641