Deposition and Characterization of Thin SiOx Films

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)39-52
    Number of pages14
    JournalThin Solid Films
    Issue number1
    StatePublished - 1980

    Bibliographical note

    Work performed by RCA Laboratories, Princeton, New Jersey, and Solar Energy Research Institute, Golden, Colorado

    NREL Publication Number

    • ACNR/JA-253-8353

    Cite this