Deposition and Characterization of Thin SiOx Films

Research output: Contribution to journal › Article

Work performed by RCA Laboratories, Princeton, New Jersey, and Solar Energy Research Institute, Golden, Colorado

NREL Publication Number

@article{81b166699820427a8b3dd651c7a28c61,

title = "Deposition and Characterization of Thin SiOx Films",

author = "NREL",

note = "Work performed by RCA Laboratories, Princeton, New Jersey, and Solar Energy Research Institute, Golden, Colorado",

year = "1980",

doi = "10.1016/0040-6090(80)90202-3",

language = "American English",

volume = "69",

pages = "39--52",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1",

}

TY - JOUR

T1 - Deposition and Characterization of Thin SiOx Films

AU - NREL, null

N1 - Work performed by RCA Laboratories, Princeton, New Jersey, and Solar Energy Research Institute, Golden, Colorado

PY - 1980

Y1 - 1980

U2 - 10.1016/0040-6090(80)90202-3

DO - 10.1016/0040-6090(80)90202-3

M3 - Article

SN - 0040-6090

VL - 69

SP - 39

EP - 52

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

ER -