Deposition and Etching of a-Si:H:F Using Silane and Xenon Difluoride

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages705-708
    Number of pages4
    StatePublished - 1987
    EventNineteenth IEEE Photovoltaic Specialists Conference-1987 - New Orleans, Louisiana
    Duration: 4 May 19878 May 1987

    Conference

    ConferenceNineteenth IEEE Photovoltaic Specialists Conference-1987
    CityNew Orleans, Louisiana
    Period4/05/878/05/87

    NREL Publication Number

    • ACNR/CP-212-8975

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