Deposition of a-Si,Sn:H Alloy Films by Reactive Magnetron Sputtering from Separate Si and Sn Targets

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)470-474
    Number of pages5
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number3, Part I
    StatePublished - 1986

    Bibliographical note

    Work performed by Department of Physics, North Carolina University, Raleigh, North Carolina

    NREL Publication Number

    • ACNR/JA-7981

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