Deposition of Diamond-Like Carbon by the ECR-RF Hybrid Plasma Technique

NREL

    Research output: Contribution to conference › Paper

    Original languageAmerican English
    Pages560-564
    Number of pages5
    StatePublished - 1990
    EventPlasma Processing: 8th Symposium - Montreal, Quebec, Canada
    Duration: 6 May 1990 → 11 May 1990

    Conference

    ConferencePlasma Processing: 8th Symposium
    CityMontreal, Quebec, Canada
    Period6/05/90 → 11/05/90

    NREL Publication Number

    • ACNR/CP-14870

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