Deposition of High Quality a-Si Films by an Innovative 'Hot Wire' CVD Technique

Deposition of High Quality a-Si Films by an Innovative 'Hot Wire' CVD Technique

Research output: Contribution to conference › Paper

Original language	American English
Pages	266-271
Number of pages	6
State	Published - 1999
Event	NCPV Photovoltaics Program Review: 15th Conference - Denver, Colorado Duration: 9 Sep 1998 → 11 Sep 1998

Conference

Conference	NCPV Photovoltaics Program Review: 15th Conference
City	Denver, Colorado
Period	9/09/98 → 11/09/98

Bibliographical note

Work performed by MVSystems, Inc., Golden, Colorado

NREL Publication Number

NREL/CP-520-27397

Cite this

@conference{fc44664ca3994095a7fc62e9ad32987a,

title = "Deposition of High Quality a-Si Films by an Innovative 'Hot Wire' CVD Technique",

author = "NREL",

note = "Work performed by MVSystems, Inc., Golden, Colorado; NCPV Photovoltaics Program Review: 15th Conference ; Conference date: 09-09-1998 Through 11-09-1998",

year = "1999",

language = "American English",

pages = "266--271",

}