Deposition of Microcrystalline Si,Ge (..mu..c-Si,Ge) Alloys by Reactive Magnetron Sputtering

Deposition of Microcrystalline Si,Ge (..mu..c-Si,Ge) Alloys by Reactive Magnetron Sputtering

Research output: Contribution to conference › Paper

Original language	American English
Pages	781-786
Number of pages	6
State	Published - 1995
Event	Microcrystalline and Nanocrystalline Semiconductors: Materials Research Society Symposium - Boston, Massachusetts Duration: 29 Nov 1994 → 2 Dec 1994

Conference

Conference	Microcrystalline and Nanocrystalline Semiconductors: Materials Research Society Symposium
City	Boston, Massachusetts
Period	29/11/94 → 2/12/94

Bibliographical note

Work performed by North Carolina State University, Raleigh, North Carolina

NREL Publication Number

ACNR/CP-16578

Cite this

@conference{ebacd661d47441dbb7de79ce388f9481,

title = "Deposition of Microcrystalline Si,Ge (..mu..c-Si,Ge) Alloys by Reactive Magnetron Sputtering",

author = "NREL",

note = "Work performed by North Carolina State University, Raleigh, North Carolina; Microcrystalline and Nanocrystalline Semiconductors: Materials Research Society Symposium ; Conference date: 29-11-1994 Through 02-12-1994",

year = "1995",

language = "American English",

pages = "781--786",

}

TY - CONF

T1 - Deposition of Microcrystalline Si,Ge (..mu..c-Si,Ge) Alloys by Reactive Magnetron Sputtering

AU - NREL, null

N1 - Work performed by North Carolina State University, Raleigh, North Carolina

PY - 1995

Y1 - 1995

M3 - Paper

SP - 781

EP - 786

T2 - Microcrystalline and Nanocrystalline Semiconductors: Materials Research Society Symposium

Y2 - 29 November 1994 through 2 December 1994

ER -