Deposition of Transparent Conducting Oxides for Solar Cells

    Research output: Contribution to conferencePaper


    Transparent conductors are needed as the front surface electrodes in all types of solar cells. The electrical and optical performance of a transparent conductor may be rated by a figure of merit defined as the ratio of the electrical conductivity to the optical absorption coefficient of the layer. Fluorine-doped zinc oxide is shown to have the highest figure of merit. ZnO:F films with a sheetresistance of 5 ohms per square can have a visible absorption of less than 3 percent. This high preformance makes zinc oxide a candidate for replacing tin oxide in thin film amorphous silicon solar cells, or for replacing part of the highly-doped silicon layer in crystalline silicon solar cells. A new, cost-effective process is described for the chemical vapor deposition of ZnO:F at atmosphericpressure.
    Original languageAmerican English
    Number of pages10
    StatePublished - 1997
    EventNREL/SNL Photovoltaics Program Review: 14th Conference - Lakewood, Colorado
    Duration: 18 Nov 199622 Nov 1996


    ConferenceNREL/SNL Photovoltaics Program Review: 14th Conference
    CityLakewood, Colorado

    Bibliographical note

    Work performed by Harvard University, Cambridge, Massachusetts

    NREL Publication Number

    • NREL/CP-23654


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