Deposition of uc-SI and uc-Si-C Thin Films by Remote Plasma-Enhanced Chemical-Vapor Deposition

Research output: Contribution to journal › Article

Department of Physics, and Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina

NLR Publication Number

@article{6d610b3197c0443e9fee4b64777dc70f,

title = "Deposition of uc-SI and uc-Si-C Thin Films by Remote Plasma-Enhanced Chemical-Vapor Deposition",

author = "NREL",

note = "Department of Physics, and Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina",

year = "1991",

doi = "10.1016/0379-6787(91)90075-Z",

language = "American English",

volume = "30",

pages = "419--434",

journal = "Solar Cells",

issn = "0379-6787",

publisher = "Elsevier B.V.",

number = "Complete",

}

TY - JOUR

T1 - Deposition of uc-SI and uc-Si-C Thin Films by Remote Plasma-Enhanced Chemical-Vapor Deposition

AU - NREL, null

N1 - Department of Physics, and Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina

PY - 1991

Y1 - 1991

U2 - 10.1016/0379-6787(91)90075-Z

DO - 10.1016/0379-6787(91)90075-Z

M3 - Article

SN - 0379-6787

VL - 30

SP - 419

EP - 434

JO - Solar Cells

JF - Solar Cells

IS - Complete

ER -