Development of a Micromachining Process for the Fabrication of a Superconductor Magnetic-Field Sensor

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{091bd29abab747f7a0748b29e2d59ca3,

title = "Development of a Micromachining Process for the Fabrication of a Superconductor Magnetic-Field Sensor",

author = "NREL",

year = "1999",

doi = "10.1007/s005420050177",

language = "American English",

volume = "6",

pages = "67--72",

journal = "Microsystem Technologies",

issn = "0946-7076",

publisher = "Springer Verlag",

}