Development of Novel RTP-like Processing for Solar Cell Fabrication using UV-Rich Light Sources: Cooperative Research and Development Final Report, CRADA Number CRD-11-442

NREL and Mattson Technology are interested in developing new processing techniques for fabrication of solar cells using UV-rich optical processing. UV light has a very high absorption coefficient in most semiconductors, allowing the semiconductor surface to be heated locally and, in some cases, without a significant increase in the substrate temperature. NREL has several projects related to cellprocessing that currently use an optical furnace (having a spectrum rich in visible and infrared light). Mattson Technology has developed a UV rich light source that can be used in either pulse or continuous modes. The objective of this CRADA is to explore applications in solar cell processing where absorption characteristics of UV light can lead to lower cell cost and/or higher efficiencies.