Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films: A Final Subcontract Report

Research output: NREL › Subcontract Report

Original language	American English
Publisher	National Renewable Energy Laboratory (NREL)
Number of pages	42
State	Published - 1984

Work performed by National Bureau of Standards, Boulder, Colorado

NREL Publication Number

@misc{6bb02c1cb5004397ace25d7613ba9269,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films: A Final Subcontract Report",

author = "NREL",

note = "Work performed by National Bureau of Standards, Boulder, Colorado",

year = "1984",

language = "American English",

publisher = "National Renewable Energy Laboratory (NREL)",

address = "United States",

type = "Other",

}