| Original language | American English |
|---|---|
| Number of pages | 20 |
| State | Published - 1981 |
Bibliographical note
Work performed by University of Colorado, Boulder, ColoradoNLR Publication Number
- SERI/TR-9053-1-T3
Other Report Number
- SERI/TR-9053-1-T3
Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous Silicon Films; Final Report; February 15, 1980 - April 14, 1981
Research output: NLR › Subcontract Report