Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1981-January 14, 1982

Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1981-January 14, 1982

NREL

Research output: NLR › Subcontract Report

Original language	American English
Number of pages	6
State	Published - 1982

Bibliographical note

Work performed by University of Colorado, Boulder, Colorado

NLR Publication Number

SERI/PR-9053-1-T6

Other Report Number

SERI/PR-9053-1-T6

Cite this

@misc{d41e135eec814a42be2550e0700dc38e,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1981-January 14, 1982",

author = "NREL",

note = "Work performed by University of Colorado, Boulder, Colorado",

year = "1982",

language = "American English",

type = "Other",

}