Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1982 - October 14, 1982

Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1982 - October 14, 1982

Research output: NREL › Subcontract Report

Original language	American English
Number of pages	6
State	Published - 1982

Bibliographical note

Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

SERI/PR-02085-1-T2

Other Report Number

SERI/PR-02085-1-T2

Cite this

@misc{95ac28e9f2104ba98f82d2345465cfe8,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; July 15, 1982 - October 14, 1982",

author = "NREL",

note = "Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1982",

language = "American English",

type = "Other",

}