Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983

Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983

Research output: NREL › Subcontract Report

Original language	American English
Number of pages	9
State	Published - 1983

Bibliographical note

Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

SERI/PR-02085-1-T3

Other Report Number

SERI/PR-02085-1-T3

Cite this

@misc{79ea9c43e1584504bdbc19ef76277a1b,

title = "Diagnostics of a Glow Discharge Used to Produce Hydrogenated Amorphous-Silicon Films; Quarterly Progress Report; October 15, 1982-January 14, 1983",

author = "NREL",

note = "Work performed by University of Colorado, Boulder, Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1983",

language = "American English",

type = "Other",

}