Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987

Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987

Research output: NREL › Subcontract Report

Original language	American English
Number of pages	52
State	Published - 1988

Bibliographical note

Work performed by National Bureau of Standards and University of Colorado, Boulder, Colorado

NREL Publication Number

SERI/SR-STR-211-3288

Cite this

@misc{4c2bc62bbad54c0d8c8b24d92ca6c9cc,

title = "Diagnostics of Glow Discharges Used to Produce Hydrogenated Amorphous Silicon Films, Annual Subcontract Report, 15 April 1986 - 14 June 1987",

author = "NREL",

note = "Work performed by National Bureau of Standards and University of Colorado, Boulder, Colorado",

year = "1988",

language = "American English",

type = "Other",

}