Diagnostics of Silane and Germane Radio Frequency Plasmas by Coherent Anti-Stokes Raman Spectroscopy

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)2022-2024
    Number of pages3
    JournalApplied Physics Letters
    Issue number24
    StatePublished - 1988

    Bibliographical note

    Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California

    NREL Publication Number

    • ACNR/JA-10528

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