Diamond-Like Carbon Coatings as Encapsulants for Photovoltaic Solar Cells

    Research output: Contribution to conferencePaper


    High-quality single-layer and bilayer diamond-like carbon (DLC) thin films are fabricated by two technologies, namely, ion-assisted plasma-enhanced deposition (IAPED) and electron cyclotron resonance (ECR) deposition. Deposition on various substrates, such as sapphires and solar cells, has been performed at low substrate temperatures (50 deg ~80 deg C). The two deposition technologies allow good controlover the growth conditions to produce DLC films with desired optical properties, thickness, and energy bandgap. The bilayer-structured DLC can be fabricated by using IAPED for the bottom layer followed by ECR for the top layer, or just by IAPED for both layers with different compositions. The DLC films have shown good spatial uniformity, density, microhardness, and adhesion strength. Theyexhibit excellent stability against attack by strong acids, prolonged damp-heat exposure at 85 deg C and 85% relative humidity, mechanical scratch, ultrasonication, and irradiation by ultraviolet (UV), protons, and electrons. When deposited on crystalline Si and GaAs solar cells in single-layer and/or bilayer structure, the DLC films not only serve as antireflection coating and protectiveencapsulant, but also improve the cell efficiencies.
    Original languageAmerican English
    Number of pages7
    StatePublished - 2005
    Event31st IEEE Photovoltaics Specialists Conference and Exhibition - Lake Buena Vista, Florida
    Duration: 3 Jan 20057 Jan 2005


    Conference31st IEEE Photovoltaics Specialists Conference and Exhibition
    CityLake Buena Vista, Florida

    NREL Publication Number

    • NREL/CP-520-37374


    • antireflection coatings
    • diamond-like carbon (DLC)
    • electron cyclotron resonance (ECR)
    • ion-assisted plasma-enhanced deposition (IAPED)
    • protective encapsulant
    • PV
    • thin films
    • ultraviolet (UV)


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