Differences between Direct and Remote Plasma Enhanced CVD

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	265-268
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	97&98, Part I
DOIs	https://doi.org/10.1016/0022-3093(87)90063-9
State	Published - 1987

Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina

NLR Publication Number

@article{7e05c48a89ff4c7eb6df73335e4281c5,

title = "Differences between Direct and Remote Plasma Enhanced CVD",

author = "NREL",

note = "Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina",

year = "1987",

doi = "10.1016/0022-3093(87)90063-9",

language = "American English",

volume = "97\&98, Part I",

pages = "265--268",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Differences between Direct and Remote Plasma Enhanced CVD

AU - NREL, null

N1 - Work performed by Department of Physics, North Carolina State University, Raleigh, North Carolina

PY - 1987

Y1 - 1987

U2 - 10.1016/0022-3093(87)90063-9

DO - 10.1016/0022-3093(87)90063-9

M3 - Article

SN - 0022-3093

VL - 97&98, Part I

SP - 265

EP - 268

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -