Diffusion-Segregation Equation for Simulation in Heterostructures

Diffusion-Segregation Equation for Simulation in Heterostructures

Research output: Contribution to conference › Paper

Original language	American English
Pages	35-49
Number of pages	15
State	Published - 1994
Event	Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop - Vail, Colorado Duration: 16 Aug 1993 → 18 Aug 1993

Conference

Conference	Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop
City	Vail, Colorado
Period	16/08/93 → 18/08/93

Bibliographical note

Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina

NREL Publication Number

ACNR/CP-15589

Cite this

@conference{ec2249e6e199480c92578ee1aab21737,

title = "Diffusion-Segregation Equation for Simulation in Heterostructures",

author = "NREL",

note = "Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina; Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop ; Conference date: 16-08-1993 Through 18-08-1993",

year = "1994",

language = "American English",

pages = "35--49",

}

TY - CONF

T1 - Diffusion-Segregation Equation for Simulation in Heterostructures

AU - NREL, null

N1 - Work performed by Department of Mechanical Engineering and Materials Science, Duke University, Durham, North Carolina

PY - 1994

Y1 - 1994

M3 - Paper

SP - 35

EP - 49

T2 - Role of Point Defects and Defect Complexes in Silicon Device Processing: Third Workshop

Y2 - 16 August 1993 through 18 August 1993

ER -