Direct Inkjet Printing of Composite Thin Barium Strontium Titanate Films

T. Kaydanova, A. Miedaner, C. Curtis, J. Alleman, J. D. Perkins, D. S. Ginley, L. Sengupta, X. Zhang, S. He, L. Chiu

Research output: Contribution to journalArticlepeer-review

13 Scopus Citations


Composite Ba0.6Sr0.4TiO3/MgO thin films with 60% tuning and tan δ of 0.007 at 2 GHz were deposited using metal organic decomposition inks by spin coating on single crystal MgO substrates. The films with approximately 1 mol% MgO in Ba0.6Sr 0.4TiO3 had a better tuning/loss ratio than either the 0 or the 10 mol% MgO substituted films. Crystalline Ba0.5Sr 0.5TiO3 films were produced on both MgO and alumina substrates by inkjet printing of metalorganic precursors with subsequent thermal decomposition followed by annealing at 900°C. Barium strontium titanate lines as narrow as 100 μm were printed on the alumina substrates. The inkjet-printed films were predominantly (100) oriented on MgO and (110) oriented on alumina. The crystalline quality of the inkjet-printed films was improved by annealing at 1100°C for 3 h in oxygen. Both the printed and the spin-coated films had smooth surfaces (300 Å root-mean-square roughness) as required for subsequent deposition of high-resolution metal electrodes. An inkjet-printed Ba0.5Sr0.5TiO3 film (3500 Å) on MgO annealed at 1100°C had 20% tunability of the dielectric constant (ε) at 9.1 V/μm direct current bias and tan δ < 0.002 at 1 MHz.

Original languageAmerican English
Pages (from-to)2820-2825
Number of pages6
JournalJournal of Materials Research
Issue number12
StatePublished - 2003

NREL Publication Number

  • NREL/JA-520-35932


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