Abstract
Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba0.6Sr0.4TiO3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.
Original language | American English |
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Pages (from-to) | 3820-3824 |
Number of pages | 5 |
Journal | Thin Solid Films |
Volume | 515 |
Issue number | 7-8 |
DOIs | |
State | Published - 2007 |
NREL Publication Number
- NREL/JA-520-37981
Keywords
- BST
- Direct write
- Inkjet
- Tunable circuits