Direct-Write InkJet Printing for Fabrication of Barium Strontium Titanate-Based Tunable Circuits

T. Kaydanova, A. Miedaner, J. D. Perkins, C. Curtis, J. L. Alleman, D. S. Ginley

Research output: Contribution to journalArticlepeer-review

48 Scopus Citations


Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba0.6Sr0.4TiO3 (BST) films using inkjet-printed liquid metalorganic precursors. BST films of various thicknesses were produced by printing multiple stacks of the individual inkjet-printed layers. The dielectric constant of the printed films increased as a function of thickness. The largest dielectric constant, 1000, and the highest tunability, 30%, were measured on a 420 nm thick film, the thickest film studied in this work. Spray-printed silver contacts were employed and demonstrated good adhesion and good electrical contact to the inkjet-printed BST films. This also demonstrated proof of principle for direct-write printing of metal contacts onto BST films from metalorganic sources.

Original languageAmerican English
Pages (from-to)3820-3824
Number of pages5
JournalThin Solid Films
Issue number7-8
StatePublished - 2007

NREL Publication Number

  • NREL/JA-520-37981


  • BST
  • Direct write
  • Inkjet
  • Tunable circuits


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