Distribution of Nitrogen Atoms in Dilute GaAsN and InGaAsN Alloys Studied by Scanning Tunneling Microscopy

  • H. A. McKay
  • , R. M. Feenstra
  • , T. Schmidtling
  • , U. W. Pohl
  • , J. F. Geisz

Research output: Contribution to journalArticlepeer-review

27 Scopus Citations

Abstract

N defects in GaAsN and InGaAsN alloys were studied by STM. Statistical analysis of the positions of N defect showed that N has a fairly uniform distribution within the layer. STM and STS results from annealed and as-grown samples were found to be consistent with this result.

Original languageAmerican English
Pages (from-to)1644-1649
Number of pages6
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume19
Issue number4
DOIs
StatePublished - 2001
Event19th North American Conference on Molecular Beam Epitaxy (NAMBE-19) - Tempe, AZ, United States
Duration: 15 Oct 200018 Oct 2000

NLR Publication Number

  • NREL/JA-520-31108

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