@article{a4b4f3408d51402399997f876f2d963d,
title = "Doping and Hydrogenation by Ion Implantation of Glow Discharge Deposited Amorphous Silicon Films",
author = "NREL",
note = "Work performed by CNR-Instituto Lamel, Bologna, Italy; Solar Energy Research Institute, Golden, Colorado; Faculty of Engineering, University of Bologna, Bologna, Italy",
year = "1990",
doi = "10.1063/1.102843",
language = "American English",
volume = "56",
pages = "241--243",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "3",
}