@article{f75e99bdf7974999b991b7eac9235c95,
title = "Doping of High-Quality Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition Near 700 ..deg..C",
keywords = "doping, epitaxy, hall, hot-wire, mobility, photovoltaics, silicon, SIMS",
author = "Ina Martin and David Young and Charles Teplin",
year = "2009",
doi = "10.1016/j.tsf.2009.01.059",
language = "American English",
volume = "517",
pages = "3496--3498",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "12",
}