Doping of Hydrogenated Amorphous Silicon Films Prepared by Laser-Induced Chemical Vapor Deposition

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageAmerican English
Title of host publicationBeam-Induced Chemical Processes
EditorsR. J. von Gutfield, J. E. Greene, H. Schlossberg
Pages105-107
StatePublished - 1985

NREL Publication Number

  • SERI/CH-520-25356

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