Dual-Chamber Plasma Deposition of A-Si:H Solar Cells at High Rates Using Disilane

Dual-Chamber Plasma Deposition of A-Si:H Solar Cells at High Rates Using Disilane

Research output: Contribution to conference › Paper

Original language	American English
Pages	27-32
Number of pages	6
State	Published - 1985
Event	MRS Spring Meeting - San Francisco, California Duration: 15 Apr 1985 → 18 Apr 1985

Conference

Conference	MRS Spring Meeting
City	San Francisco, California
Period	15/04/85 → 18/04/85

Bibliographical note

Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York

NREL Publication Number

ACNR/CP-8017

Cite this

@conference{6fb4a658437a477c9461bc070639127d,

title = "Dual-Chamber Plasma Deposition of A-Si:H Solar Cells at High Rates Using Disilane",

author = "NREL",

note = "Work performed by Metallurgy and Materials Science Division, Brookhaven National Laboratory, Upton, New York; MRS Spring Meeting ; Conference date: 15-04-1985 Through 18-04-1985",

year = "1985",

language = "American English",

pages = "27--32",

}