EELS Study of Hydrogenated Amorphous Silicon

N. A. Burnharn, R. F. Fisher, S. E. Asher, L. L. Kazmerski

Research output: Contribution to journalArticlepeer-review

4 Scopus Citations
Original languageAmerican English
Pages (from-to)2016-2018
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - 1 Jul 1987

NREL Publication Number

  • ACNR/JA-213-8202

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