EELS Study of Hydrogenated Amorphous Silicon

N. A. Burnharn; R. F. Fisher; S. E. Asher; L. L. Kazmerski

doi:10.1116/1.574906

EELS Study of Hydrogenated Amorphous Silicon

N. A. Burnharn, R. F. Fisher, S. E. Asher, L. L. Kazmerski

Materials Science

National Renewable Energy Laboratory

Research output: Contribution to journal › Article › peer-review

4 Scopus Citations

Original language	American English
Pages (from-to)	2016-2018
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574906 https://doi.org/10.1116/1.574906
State	Published - 1 Jul 1987

NREL Publication Number

ACNR/JA-213-8202

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title = "EELS Study of Hydrogenated Amorphous Silicon",

author = "Burnharn, {N. A.} and Fisher, {R. F.} and Asher, {S. E.} and Kazmerski, {L. L.}",

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AU - Burnharn, N. A.

AU - Fisher, R. F.

AU - Asher, S. E.

AU - Kazmerski, L. L.

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JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

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EELS Study of Hydrogenated Amorphous Silicon

NREL Publication Number

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