Effect of Deposition Distance and Temperature on Electrical, Optical and Structural Properties of Radio-Frequency Magnetron-Sputtered Gallium-Doped Zinc Oxide

Brandon Reese; Paul Halloway; Christopher Gorrie; Ajaya Sigdel; John Perkins

doi:10.1016/j.tsf.2010.07.098

Effect of Deposition Distance and Temperature on Electrical, Optical and Structural Properties of Radio-Frequency Magnetron-Sputtered Gallium-Doped Zinc Oxide

Brandon Reese, Paul Halloway, Christopher Gorrie, Ajaya Sigdel, John Perkins

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	190-196
Number of pages	7
Journal	Thin Solid Films
Volume	519
Issue number	1
DOIs	https://doi.org/10.1016/j.tsf.2010.07.098
State	Published - 2010

NREL Publication Number

NREL/JA-520-48751

Keywords

electronic properties
gallium-doped zinc oxide
optical properties
radio-frequency magnetron sputtering
structural properties

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10.1016/j.tsf.2010.07.098

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title = "Effect of Deposition Distance and Temperature on Electrical, Optical and Structural Properties of Radio-Frequency Magnetron-Sputtered Gallium-Doped Zinc Oxide",

keywords = "electronic properties, gallium-doped zinc oxide, optical properties, radio-frequency magnetron sputtering, structural properties",

author = "Brandon Reese and Paul Halloway and Christopher Gorrie and Ajaya Sigdel and John Perkins",

year = "2010",

doi = "10.1016/j.tsf.2010.07.098",

language = "American English",

volume = "519",

pages = "190--196",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1",

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TY - JOUR

T1 - Effect of Deposition Distance and Temperature on Electrical, Optical and Structural Properties of Radio-Frequency Magnetron-Sputtered Gallium-Doped Zinc Oxide

AU - Reese, Brandon

AU - Halloway, Paul

AU - Gorrie, Christopher

AU - Sigdel, Ajaya

AU - Perkins, John

PY - 2010

Y1 - 2010

KW - electronic properties

KW - gallium-doped zinc oxide

KW - optical properties

KW - radio-frequency magnetron sputtering

KW - structural properties

UR - http://www.scopus.com/inward/record.url?scp=77957715655&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2010.07.098

DO - 10.1016/j.tsf.2010.07.098

M3 - Article

SN - 0040-6090

VL - 519

SP - 190

EP - 196

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1

ER -

Effect of Deposition Distance and Temperature on Electrical, Optical and Structural Properties of Radio-Frequency Magnetron-Sputtered Gallium-Doped Zinc Oxide

NREL Publication Number

Keywords

Access to Document

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