Effect of Hydrogen Dilution on the Properties and Bonding in Plasma-Deposited Silicon Nitride

Research output: Contribution to journal › Article

NREL Publication Number

@article{7ea260bc5d174ce68183cd90a9722fe7,

title = "Effect of Hydrogen Dilution on the Properties and Bonding in Plasma-Deposited Silicon Nitride",

author = "NREL",

year = "1992",

doi = "10.1063/1.352130",

language = "American English",

volume = "72",

pages = "282--284",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}