Effect of Low Level Doping of Boron and Phosphorous on the Properties of Amorphous Silicon Films

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages8
    StatePublished - 1987
    EventMRS Spring Meeting - Anaheim, California
    Duration: 21 Apr 198724 Apr 1987


    ConferenceMRS Spring Meeting
    CityAnaheim, California

    Bibliographical note

    Work performed by Electronic and Information Sector Laboratories, 3M Company, St. Paul, Minnesota

    NREL Publication Number

    • ACNR/CP-10027

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