Abstract
Thin hydrogenated amorphous silicon (a-Si:H) layers deposited by hot-wire chemical vapor deposition (HWCVD) are investigated for use in silicon heterojunction (SHJ) solar cells on p-type crystalline silicon wafers. A requirement for excellent emitter quality is minimization of interface recombination. Best results necessitate immediate a-Si:H deposition and an abrupt and flat interface to the c-Si substrate. We obtain a record planar HJ efficiency of 16.9% with a high Voc of 652 mV on p-type float-zone (FZ) silicon substrates with HWCVD a-Si:H(n) emitters and screen-printed AI-BSF contacts. H pretreatment by HWCVD is beneficial when limited to a very short period prior to emitter deposition.
Original language | American English |
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Pages | 955-958 |
Number of pages | 4 |
State | Published - 2005 |
Event | 31st IEEE Photovoltaic Specialists Conference - 2005 - Lake Buena Vista, FL, United States Duration: 3 Jan 2005 → 7 Jan 2005 |
Conference
Conference | 31st IEEE Photovoltaic Specialists Conference - 2005 |
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Country/Territory | United States |
City | Lake Buena Vista, FL |
Period | 3/01/05 → 7/01/05 |
Bibliographical note
For preprint version see NREL/CP-520-37457NREL Publication Number
- NREL/CP-520-38896