Effects of Magnetic Field Configuration on rf Sputtering for CdS/CdTe Solar Cells

    Research output: Contribution to conferencePaper

    Abstract

    We report studies of solar cells prepared by rf planar magnetron sputtering in which the films were deposited using magnetic field structures ranging from approximately balanced to strongly unbalanced in the 'type II' configuration. For films grown with the unbalanced configurations, we find much stronger photoluminescence and much better cell performance than for the balanced configuration. TheCdTe films show differences in electrical performance depending on magnetic field as well. These effects are intepreted as arising from the enhanced electron and ion bombardment of the film growth interface for the unbalanced magnetrons. Using two unbalanced magnetrons we have fabricated an all-rf-sputtered cell with NREL-verified efficiency of 11.6% at air mass 1.5 illumination.
    Original languageAmerican English
    Pages391-396
    Number of pages6
    StatePublished - 1996
    EventThin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium - San Francisco, California
    Duration: 8 Apr 199611 Apr 1996

    Conference

    ConferenceThin Films for Photovoltaic and Related Device Applications: Materials Research Society Symposium
    CitySan Francisco, California
    Period8/04/9611/04/96

    Bibliographical note

    Work performed by University of Toledo, Toledo, Ohio

    NREL Publication Number

    • NREL/CP-23039

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