@article{261b9fbc8941455dbf0bc7b0dba7b363,
title = "Effects of Monochlorosilane on the Properties of Plasma Deposited Hydrogenated Amorphous Silicon",
author = "NREL",
note = "Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York",
year = "1982",
doi = "10.1007/BF02658902",
language = "American English",
volume = "11",
pages = "869--882",
journal = "Journal of Electronic Materials",
issn = "0361-5235",
publisher = "Springer New York",
number = "5",
}