Effects of Monochlorosilane on the Properties of Plasma Deposited Hydrogenated Amorphous Silicon

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)869-882
    Number of pages14
    JournalJournal of Electronic Materials
    Issue number5
    StatePublished - 1982

    Bibliographical note

    Work performed by Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, New York

    NREL Publication Number

    • ACNR/JA-3948

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