Effects of Oxygen Content on the Optical Properties of Tantalum Oxide Films Deposited by Ion-Beam Sputtering

Research output: Contribution to journal › Article

Work performed by Colorado State University, Fort Collins, Colorado

NREL Publication Number

@article{e28f45658b3d42e4a9fdaa678d60a6a7,

title = "Effects of Oxygen Content on the Optical Properties of Tantalum Oxide Films Deposited by Ion-Beam Sputtering",

author = "NREL",

note = "Work performed by Colorado State University, Fort Collins, Colorado",

year = "1985",

doi = "10.1364/AO.24.000490",

language = "American English",

volume = "24",

pages = "490--495",

journal = "Applied Optics",

issn = "1559-128X",

publisher = "Optica Publishing Group",

number = "4",

}

TY - JOUR

T1 - Effects of Oxygen Content on the Optical Properties of Tantalum Oxide Films Deposited by Ion-Beam Sputtering

AU - NREL, null

N1 - Work performed by Colorado State University, Fort Collins, Colorado

PY - 1985

Y1 - 1985

U2 - 10.1364/AO.24.000490

DO - 10.1364/AO.24.000490

M3 - Article

SN - 1559-128X

VL - 24

SP - 490

EP - 495

JO - Applied Optics

JF - Applied Optics

IS - 4

ER -