Effects of Pure-Hydrogen and Pure-Argon Plasmas on the Near-Surface Type Conversion of p-InP

Research output: Contribution to conference › Paper

Original language	American English
Pages	328-331
Number of pages	4
DOIs	https://doi.org/10.1109/ICIPRM.1992.235686
State	Published - 1992
Event	Conference Fourth International Conference on Indium Phosphide and Related Materials - Newport, Rhode Island Duration: 21 Apr 1992 → 24 Apr 1992

Conference	Conference Fourth International Conference on Indium Phosphide and Related Materials
City	Newport, Rhode Island
Period	21/04/92 → 24/04/92

NREL Publication Number

@conference{6fb5ac221c914f6f8bf03238c4f7c9e3,

title = "Effects of Pure-Hydrogen and Pure-Argon Plasmas on the Near-Surface Type Conversion of p-InP",

author = "NREL",

year = "1992",

doi = "10.1109/ICIPRM.1992.235686",

language = "American English",

pages = "328--331",

note = "Conference Fourth International Conference on Indium Phosphide and Related Materials ; Conference date: 21-04-1992 Through 24-04-1992",

}

TY - CONF

T1 - Effects of Pure-Hydrogen and Pure-Argon Plasmas on the Near-Surface Type Conversion of p-InP

AU - NREL, null

PY - 1992

Y1 - 1992

U2 - 10.1109/ICIPRM.1992.235686

DO - 10.1109/ICIPRM.1992.235686

M3 - Paper

SP - 328

EP - 331

T2 - Conference Fourth International Conference on Indium Phosphide and Related Materials

Y2 - 21 April 1992 through 24 April 1992

ER -