Abstract
This document reports on work performed by Energy Conversion Devices, Inc. (ECD) during Phase I of this subcontract. During this period, ECD researchers: 1) Completed design and construction of new, improved substrate heater; 2) Tested and verified improved performance of the new substrate heater in the pilot machine; 3) Verified improved performance of the new substrate heater in the productionmachine; 4) Designed and bench-tested a new infrared temperature sensor; 5) Installed a prototype new infrared temperature sensor in the production machine for evaluation; 6) Designed a new rolling thermocouple temperature sensor; 7) Designed and bench-tested a reflectometer for the backreflector deposition machine; 8) Designed and bench-tested in-line non-contacting cell diagnostic sensor andPV capacitive diagnostic system; 9) Installed the in-line cell diagnostic sensor in the 5-MW a-Si deposition machine for evaluation; 10) Demonstrated a new low-cost zinc metal process in the pilot backreflector machine; and 11) Fully tested a new cathode design for improved uniformity.
Original language | American English |
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Number of pages | 94 |
State | Published - 1999 |
Bibliographical note
Work performed by Energy Conversion Devices, Inc., Troy, MichiganNREL Publication Number
- NREL/SR-520-27535