Efficient Black Silicon Photovoltaic Devices with Enhanced Blue Response

Jihun Oh (Inventor), Howard Branz (Inventor), Hao-Chih Yuan (Inventor)

Research output: Patent


A photovoltaic (PV) device with improved blue response. The PV device includes a silicon substrate with an emitter layer on a light receiving side. The emitter layer has a low opant level such that it has sheet resistance of 90 to 170 ohm/sq. Anti-reflection in the PV device is provided solely by a nano-structured or black silicon surface on the light-receiving surface, through which the emitter is formed by diffusion. The nano structures of the black silicon are formed in a manner that does not result in gold or another high-recombination metal being left in the black silicon such as with metal-assisted etching using silver. The black silicon is further processed to widen these pores so as to provide larger nanostructures with lateral dimensions in the range of 65 to 150 nanometers so as to reduce surface area and also to etch away a highly doped portion of the emitter.
Original languageAmerican English
Patent number11,251,318 B2
Filing date15/02/22
StatePublished - 2022

NREL Publication Number

  • NREL/PT-5K00-82230


  • black silicon solar cells
  • blue and green photons
  • high photocarrier recombination
  • internal quantum efficiency (IQE)


Dive into the research topics of 'Efficient Black Silicon Photovoltaic Devices with Enhanced Blue Response'. Together they form a unique fingerprint.

Cite this