Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch

Hao Chih Yuan; Vernon E. Yost; Matthew R. Page; Lorenzo Roybal; Bobby To; Paul Stradins; Daniel L. Meier; Howard M. Branz

doi:10.1109/PVSC.2009.5411711

Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch

Hao Chih Yuan, Vernon E. Yost, Matthew R. Page, Lorenzo Roybal, Bobby To, Paul Stradins, Daniel L. Meier, Howard M. Branz

Chemistry and Nanoscience

Research output: Contribution to conference › Paper › peer-review

13 Scopus Citations

Abstract

We fabricated black silicon solar cells with conversion efficiency of 16.8% on p-type single crystal Si wafers with a conventional diffused emitter and Al back-surface field (BSF). We replaced the anti-reflection coating step with a single 3-minute 'black-silicon' etch of the bare wafer before processing. The nanoporous black-silicon layer, about 300-nm thick is produced in a 3-minute single-step liquid etch based upon catalysis by Au nano-particles formed in a solution containing HF and H₂O₂. Solar cell reflectance is well below 5% at incident wavelengths from 350 to 1000 nm. We present reflectance versus time data during this simple single-step etching. We also characterize cell performance and find that recombination in the black silicon surface layer must still be reduced.

Original language	American English
Pages	141-145
Number of pages	5
DOIs	https://doi.org/10.1109/PVSC.2009.5411711 https://doi.org/10.1109/PVSC.2009.5411711
State	Published - 2009
Event	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 - Philadelphia, PA, United States Duration: 7 Jun 2009 → 12 Jun 2009

Conference

Conference	2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009
Country/Territory	United States
City	Philadelphia, PA
Period	7/06/09 → 12/06/09

NREL Publication Number

NREL/CP-520-46036

Keywords

coatings
etching
gold
hafnium
laboratories
nanoporous materials
photovoltaic cells
reflectivity
renewable energy resources
silicon

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Yuan, H. C., Yost, V. E., Page, M. R., Roybal, L., To, B., Stradins, P., Meier, D. L., & Branz, H. M. (2009). Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch. 141-145. Paper presented at 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009, Philadelphia, PA, United States. https://doi.org/10.1109/PVSC.2009.5411711, https://doi.org/10.1109/PVSC.2009.5411711

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title = "Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch",

abstract = "We fabricated black silicon solar cells with conversion efficiency of 16.8% on p-type single crystal Si wafers with a conventional diffused emitter and Al back-surface field (BSF). We replaced the anti-reflection coating step with a single 3-minute 'black-silicon' etch of the bare wafer before processing. The nanoporous black-silicon layer, about 300-nm thick is produced in a 3-minute single-step liquid etch based upon catalysis by Au nano-particles formed in a solution containing HF and H2O2. Solar cell reflectance is well below 5% at incident wavelengths from 350 to 1000 nm. We present reflectance versus time data during this simple single-step etching. We also characterize cell performance and find that recombination in the black silicon surface layer must still be reduced.",

keywords = "coatings, etching, gold, hafnium, laboratories, nanoporous materials, photovoltaic cells, reflectivity, renewable energy resources, silicon",

author = "Yuan, {Hao Chih} and Yost, {Vernon E.} and Page, {Matthew R.} and Lorenzo Roybal and Bobby To and Paul Stradins and Meier, {Daniel L.} and Branz, {Howard M.}",

year = "2009",

doi = "10.1109/PVSC.2009.5411711",

language = "American English",

pages = "141--145",

note = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 ; Conference date: 07-06-2009 Through 12-06-2009",

}

Yuan, HC, Yost, VE, Page, MR, Roybal, L, To, B, Stradins, P, Meier, DL & Branz, HM 2009, 'Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch', Paper presented at 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009, Philadelphia, PA, United States, 7/06/09 - 12/06/09 pp. 141-145. https://doi.org/10.1109/PVSC.2009.5411711, https://doi.org/10.1109/PVSC.2009.5411711

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AU - Yuan, Hao Chih

AU - Yost, Vernon E.

AU - Page, Matthew R.

AU - Roybal, Lorenzo

AU - To, Bobby

AU - Stradins, Paul

AU - Meier, Daniel L.

AU - Branz, Howard M.

PY - 2009

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AB - We fabricated black silicon solar cells with conversion efficiency of 16.8% on p-type single crystal Si wafers with a conventional diffused emitter and Al back-surface field (BSF). We replaced the anti-reflection coating step with a single 3-minute 'black-silicon' etch of the bare wafer before processing. The nanoporous black-silicon layer, about 300-nm thick is produced in a 3-minute single-step liquid etch based upon catalysis by Au nano-particles formed in a solution containing HF and H2O2. Solar cell reflectance is well below 5% at incident wavelengths from 350 to 1000 nm. We present reflectance versus time data during this simple single-step etching. We also characterize cell performance and find that recombination in the black silicon surface layer must still be reduced.

KW - coatings

KW - etching

KW - gold

KW - hafnium

KW - laboratories

KW - nanoporous materials

KW - photovoltaic cells

KW - reflectivity

KW - renewable energy resources

KW - silicon

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DO - 10.1109/PVSC.2009.5411711

M3 - Paper

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EP - 145

T2 - 2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009

Y2 - 7 June 2009 through 12 June 2009

ER -

Efficient Black Silicon Solar Cells with Nanoporous Anti-Reflection Made in a Single-Step Liquid Etch

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Keywords

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