Elastic Properties, Intrinsic and Photoinduced Stress in Hydrogenated Amorphous-Silicon Thin Films with Different Hydrogen Content

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{997d075d822540ef926cef00116fddf3,

title = "Elastic Properties, Intrinsic and Photoinduced Stress in Hydrogenated Amorphous-Silicon Thin Films with Different Hydrogen Content",

author = "NREL",

year = "2001",

doi = "10.1063/1.1353807",

language = "American English",

volume = "89",

pages = "4294--4300",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "8",

}