Elastic Properties of Several Silicon Nitride Films: Paper No. 0989-A22-01

Elastic Properties of Several Silicon Nitride Films: Paper No. 0989-A22-01

Research output: Contribution to conference › Paper

Original language	American English
Pages	511-516
Number of pages	6
State	Published - 2007
Event	Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2007: Materials Research Society Symposium - San Francisco, California Duration: 9 Apr 2007 → 13 Apr 2007

Conference

Conference	Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2007: Materials Research Society Symposium
City	San Francisco, California
Period	9/04/07 → 13/04/07

NREL Publication Number

NREL/CP-520-41659

Cite this

@conference{09ddd511d81749598aae076097704a3f,

title = "Elastic Properties of Several Silicon Nitride Films: Paper No. 0989-A22-01",

author = "NREL",

year = "2007",

language = "American English",

pages = "511--516",

note = "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2007: Materials Research Society Symposium ; Conference date: 09-04-2007 Through 13-04-2007",

}