Electrical and Optical Properties of Ion Beam Sputtered ZnO:Al Films as a Function of Film Thickness

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)PP. 996-1000
    Number of pages5
    JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
    Issue number4
    StatePublished - 1993

    NREL Publication Number

    • ACNR/JA-413-13196

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