Electrical Properties of Boron-Doped ..mu..c-Si:H Prepared by Reactive Magnetron Sputtering from c-Si Targets

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1993
    EventMaterials Research Society Symposium - Boston, Massachusetts
    Duration: 30 Nov 19924 Dec 1992


    ConferenceMaterials Research Society Symposium
    CityBoston, Massachusetts

    Bibliographical note

    Work performed by North Carolina State University, Departments of Physics and Materials Science and Engineering, Raleigh, North Carolina

    NREL Publication Number

    • ACNR/CP-14594

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