Electron Beam Effects in the Analysis of Compound Semiconductors and Devices

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	2814-2818
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	5
DOIs	https://doi.org/10.1116/1.574313
State	Published - 1987

NREL Publication Number

@article{0bae4ef4f37042c18c015ef6a030933e,

title = "Electron Beam Effects in the Analysis of Compound Semiconductors and Devices",

author = "NREL",

year = "1987",

doi = "10.1116/1.574313",

language = "American English",

volume = "5",

pages = "2814--2818",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "5",

}

TY - JOUR

T1 - Electron Beam Effects in the Analysis of Compound Semiconductors and Devices

AU - NREL, null

PY - 1987

Y1 - 1987

UR - http://www.scopus.com/inward/record.url?scp=0040808689&partnerID=8YFLogxK

U2 - 10.1116/1.574313

DO - 10.1116/1.574313

M3 - Article

SN - 0734-2101

VL - 5

SP - 2814

EP - 2818

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -