Electron Beam Effects in the Analysis of Compound Semiconductors and Devices

L. L. Kazmerski, N. A. Burnham, A. B. Swartzfander, A. J. Nelson, S. E. Asher

Research output: Contribution to journalArticlepeer-review

6 Scopus Citations


The effects of electron beams on the analysis of CulnSe2 surfaces are examined in this paper. Potential changes in the surface chemistry-including oxidation and desorption-under a range of incident probe conditions, are investigated for possible artifactual information generation. Emphasis is placed on the relationships between beam conditions and oxygen chemisorption and physisorption, since oxygen treatments of devices utilizing this semiconductor are critical to performance. Single crystals and polycrystalline thin films are analyzed and compared to establish the beam-induced phenomena.

Original languageAmerican English
Pages (from-to)2814-2818
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number5
StatePublished - 1987

NREL Publication Number

  • ACNR/JA-213-9824


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